试样的表面形状的测定方法及装置

Method for measuring surface profile of sample and apparatus for measuring surface profile of sample

Abstract

本发明提供不对试样作用强的力而能够抑制探针的跳跃的试样的表面形状的测定方法及装置。在短时间内进行控制操作,该控制操作包括由传感器进行的被测定表面上的探针的垂直方向的位移的检测、基于探针的位移检测的探针的速度及加速度的计算、由探针的速度及加速度的至少一方的实时的监视进行的探针的跳跃的检测、对探针的针压产生装置的电流控制,仅在探针处于空中时,增大作用于探针的针压,在探针再接触试样之前使探针的针压返回原来的状态。
A method for measuring surface profile of a sample, wherein jumping of a probe can be constrained without applying strong force to the sample, and an apparatus employing such a method. Control operation consists of detection of displacement in a probe in the vertical direction on the top surface of a sample being measured by means of a sensor, calculation of velocity and acceleration of the probein accordance with detection of the displacement in the probe, detection of jumping of the probe through real-time monitoring of at least either velocity or acceleration of the probe, and a control of the current delivered to a stylus pressure generator for the probe. Such a control operation is performed in a small amount of time, and a stylus pressure applied to the probe is increased only while the probe is in the air, while the stylus pressure applied to the probe is returned to an original pressure before the probe touches the sample again.

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NO-Patent Citations (3)

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    JP特开2004-340868A 2004.12.02
    JP特开2006-10469A 2006.01.12
    JP特开2007-57308A 2007.03.08

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