Liquid ejecting head, liquid ejecting apparatus, and actuator

喷液头、喷液装置以及致动器

Abstract

本发明涉及喷液头、喷液装置以及致动器,能够对起因于中空部的端部处的应力集中的压电元件的损坏进行抑制,构成为:在对向于压电元件(300)的区域,设置有去除了被覆膜(100)及第2电极(80)的一部分的中空部(101),形成中空部(101)的被覆膜(100)的端面相对于流路形成基板(10)的倾斜角度θ1与形成中空部(101)的第2电极(80)的端面的倾斜角度θ2满足θ2<θ1的关系。
The invention provides a liquid ejecting head, a liquid ejecting apparatus, and an actuator which can suppress breakage of a piezoelectric element due to stress concentration at an end portion of a hollow section, wherein a hollow section formed by removing the coating film and a part of the second electrode is provided at an area opposite to the piezoelectric element, and an inclination angle [theta]1 of an end face of the coating film defining the hollow section with respect to the flow channel forming substrate and an inclination angle [theta]2 of an end face of the second electrode defining the hollow section satisfy a relationship of [theta]2<[theta]1.

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Patent Citations (1)

    Publication numberPublication dateAssigneeTitle
    CN-1435320-AAugust 13, 2003精工爱普生株式会社压电体元件、液体喷头以及压电体元件的制造方法

NO-Patent Citations (2)

    Title
    JP特开2003-298136A 2003.10.17
    JP特开2005-035282A 2005.02.10

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