Liquid ejecting head, liquid ejecting apparatus, and actuator



The invention provides a liquid ejecting head, a liquid ejecting apparatus, and an actuator which can suppress breakage of a piezoelectric element due to stress concentration at an end portion of a hollow section, wherein a hollow section formed by removing the coating film and a part of the second electrode is provided at an area opposite to the piezoelectric element, and an inclination angle [theta]1 of an end face of the coating film defining the hollow section with respect to the flow channel forming substrate and an inclination angle [theta]2 of an end face of the second electrode defining the hollow section satisfy a relationship of [theta]2<[theta]1.




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Patent Citations (1)

    Publication numberPublication dateAssigneeTitle
    CN-1435320-AAugust 13, 2003精工爱普生株式会社压电体元件、液体喷头以及压电体元件的制造方法

NO-Patent Citations (2)

    JP特开2003-298136A 2003.10.17
    JP特开2005-035282A 2005.02.10

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